8/7/2012	10:28:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	10:28:56 AM	Recipe started at 10:28 AM
8/7/2012	10:28:56 AM	Helium valve closed
8/7/2012	10:28:56 AM	H2 valve closed
8/7/2012	10:28:56 AM	BCl3 valve closed
8/7/2012	10:28:56 AM	PH3 valve closed
8/7/2012	10:28:56 AM	SiCl4 pre valve closed
8/7/2012	10:28:56 AM	SiCl4 post valve closed
8/7/2012	10:28:56 AM	Main Vac valve closed
8/7/2012	10:28:56 AM	Bypass valve closed
8/7/2012	10:28:56 AM	Bubbler valve closed
8/7/2012	10:28:56 AM	Helium MFC set to  0.000000
8/7/2012	10:28:56 AM	H2 MFC set to  0.000000
8/7/2012	10:28:56 AM	BCl3 MFC set to  0.000000
8/7/2012	10:28:56 AM	PH3 MFC set to  0.000000
8/7/2012	10:28:56 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:28:56 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:28:56 AM	Tube furnace set to 0
8/7/2012	10:28:59 AM	H2 valve closed
8/7/2012	10:28:59 AM	BCl3 valve closed
8/7/2012	10:28:59 AM	PH3 valve closed
8/7/2012	10:28:59 AM	SiCl4 pre valve closed
8/7/2012	10:28:59 AM	SiCl4 post valve closed
8/7/2012	10:28:59 AM	Main Vac valve closed
8/7/2012	10:28:59 AM	Bypass valve closed
8/7/2012	10:28:59 AM	Bubbler valve closed
8/7/2012	10:28:59 AM	Helium valve opened
8/7/2012	10:28:59 AM	Helium MFC set to  500.000000
8/7/2012	10:28:59 AM	H2 MFC set to  0.000000
8/7/2012	10:28:59 AM	BCl3 MFC set to  0.000000
8/7/2012	10:28:59 AM	PH3 MFC set to  0.000000
8/7/2012	10:28:59 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:28:59 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:29:00 AM	Tube furnace set to 0
8/7/2012	10:30:12 AM	Helium valve closed
8/7/2012	10:30:12 AM	H2 valve closed
8/7/2012	10:30:12 AM	BCl3 valve closed
8/7/2012	10:30:12 AM	PH3 valve closed
8/7/2012	10:30:12 AM	SiCl4 pre valve closed
8/7/2012	10:30:12 AM	SiCl4 post valve closed
8/7/2012	10:30:12 AM	Main Vac valve closed
8/7/2012	10:30:12 AM	Bypass valve closed
8/7/2012	10:30:12 AM	Bubbler valve closed
8/7/2012	10:30:12 AM	Helium MFC set to  0.000000
8/7/2012	10:30:12 AM	H2 MFC set to  0.000000
8/7/2012	10:30:12 AM	BCl3 MFC set to  0.000000
8/7/2012	10:30:12 AM	PH3 MFC set to  0.000000
8/7/2012	10:30:12 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:30:12 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:30:12 AM	Tube furnace set to 0
8/7/2012	10:30:13 AM	Run finished at 10:30 AM
8/7/2012	10:30:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	10:35:17 AM	Tube furnace set to 400
8/7/2012	10:35:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	10:35:23 AM	Recipe started at 10:35 AM
8/7/2012	10:35:23 AM	Helium valve closed
8/7/2012	10:35:23 AM	H2 valve closed
8/7/2012	10:35:23 AM	BCl3 valve closed
8/7/2012	10:35:23 AM	PH3 valve closed
8/7/2012	10:35:23 AM	SiCl4 pre valve closed
8/7/2012	10:35:23 AM	SiCl4 post valve closed
8/7/2012	10:35:23 AM	Main Vac valve closed
8/7/2012	10:35:23 AM	Bubbler valve closed
8/7/2012	10:35:23 AM	Bypass valve opened
8/7/2012	10:35:23 AM	Helium MFC set to  0.000000
8/7/2012	10:35:23 AM	H2 MFC set to  0.000000
8/7/2012	10:35:23 AM	BCl3 MFC set to  0.000000
8/7/2012	10:35:23 AM	PH3 MFC set to  0.000000
8/7/2012	10:35:23 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:35:23 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:35:23 AM	Tube furnace set to 0
8/7/2012	10:36:43 AM	Helium valve closed
8/7/2012	10:36:43 AM	H2 valve closed
8/7/2012	10:36:43 AM	BCl3 valve closed
8/7/2012	10:36:43 AM	PH3 valve closed
8/7/2012	10:36:43 AM	SiCl4 pre valve closed
8/7/2012	10:36:43 AM	SiCl4 post valve closed
8/7/2012	10:36:43 AM	Main Vac valve closed
8/7/2012	10:36:43 AM	Bubbler valve closed
8/7/2012	10:36:43 AM	Bypass valve opened
8/7/2012	10:36:43 AM	Helium MFC set to  0.000000
8/7/2012	10:36:43 AM	H2 MFC set to  0.000000
8/7/2012	10:36:43 AM	BCl3 MFC set to  0.000000
8/7/2012	10:36:43 AM	PH3 MFC set to  0.000000
8/7/2012	10:36:43 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:36:43 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:36:43 AM	Tube furnace set to 0
8/7/2012	10:37:43 AM	Helium valve closed
8/7/2012	10:37:43 AM	H2 valve closed
8/7/2012	10:37:43 AM	BCl3 valve closed
8/7/2012	10:37:43 AM	PH3 valve closed
8/7/2012	10:37:43 AM	SiCl4 pre valve closed
8/7/2012	10:37:43 AM	SiCl4 post valve closed
8/7/2012	10:37:43 AM	Bypass valve closed
8/7/2012	10:37:43 AM	Bubbler valve closed
8/7/2012	10:37:43 AM	Main Vac valve opened
8/7/2012	10:37:43 AM	Helium MFC set to  0.000000
8/7/2012	10:37:43 AM	H2 MFC set to  0.000000
8/7/2012	10:37:43 AM	BCl3 MFC set to  0.000000
8/7/2012	10:37:43 AM	PH3 MFC set to  0.000000
8/7/2012	10:37:43 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:37:43 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:37:43 AM	Tube furnace set to 0
8/7/2012	10:37:44 AM	Run finished at 10:37 AM
8/7/2012	10:37:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	10:37:54 AM	Tube furnace set to 400
8/7/2012	10:41:37 AM	Tube furnace set to 0
8/7/2012	10:47:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	10:47:03 AM	Recipe started at 10:47 AM
8/7/2012	10:47:03 AM	Helium valve closed
8/7/2012	10:47:03 AM	H2 valve closed
8/7/2012	10:47:03 AM	BCl3 valve closed
8/7/2012	10:47:03 AM	PH3 valve closed
8/7/2012	10:47:03 AM	SiCl4 pre valve closed
8/7/2012	10:47:03 AM	SiCl4 post valve closed
8/7/2012	10:47:03 AM	Main Vac valve closed
8/7/2012	10:47:03 AM	Bypass valve closed
8/7/2012	10:47:03 AM	Bubbler valve closed
8/7/2012	10:47:03 AM	Helium MFC set to  0.000000
8/7/2012	10:47:03 AM	H2 MFC set to  0.000000
8/7/2012	10:47:03 AM	BCl3 MFC set to  0.000000
8/7/2012	10:47:03 AM	PH3 MFC set to  0.000000
8/7/2012	10:47:03 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:47:03 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:47:03 AM	Tube furnace set to 0
8/7/2012	10:47:06 AM	H2 valve closed
8/7/2012	10:47:06 AM	BCl3 valve closed
8/7/2012	10:47:06 AM	PH3 valve closed
8/7/2012	10:47:06 AM	SiCl4 pre valve closed
8/7/2012	10:47:06 AM	SiCl4 post valve closed
8/7/2012	10:47:06 AM	Main Vac valve closed
8/7/2012	10:47:07 AM	Bypass valve closed
8/7/2012	10:47:07 AM	Bubbler valve closed
8/7/2012	10:47:07 AM	Helium valve opened
8/7/2012	10:47:07 AM	Helium MFC set to  500.000000
8/7/2012	10:47:07 AM	H2 MFC set to  0.000000
8/7/2012	10:47:07 AM	BCl3 MFC set to  0.000000
8/7/2012	10:47:07 AM	PH3 MFC set to  0.000000
8/7/2012	10:47:07 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:47:07 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:47:07 AM	Tube furnace set to 0
8/7/2012	10:47:44 AM	Helium valve closed
8/7/2012	10:47:44 AM	H2 valve closed
8/7/2012	10:47:44 AM	BCl3 valve closed
8/7/2012	10:47:44 AM	PH3 valve closed
8/7/2012	10:47:44 AM	SiCl4 pre valve closed
8/7/2012	10:47:44 AM	SiCl4 post valve closed
8/7/2012	10:47:44 AM	Main Vac valve closed
8/7/2012	10:47:44 AM	Bypass valve closed
8/7/2012	10:47:44 AM	Bubbler valve closed
8/7/2012	10:47:44 AM	Helium MFC set to  0.000000
8/7/2012	10:47:45 AM	H2 MFC set to  0.000000
8/7/2012	10:47:45 AM	BCl3 MFC set to  0.000000
8/7/2012	10:47:45 AM	PH3 MFC set to  0.000000
8/7/2012	10:47:45 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:47:45 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:47:45 AM	Tube furnace set to 0
8/7/2012	10:47:46 AM	Run finished at 10:47 AM
8/7/2012	10:47:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	10:53:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	10:53:15 AM	Recipe started at 10:53 AM
8/7/2012	10:53:15 AM	Helium valve closed
8/7/2012	10:53:15 AM	H2 valve closed
8/7/2012	10:53:15 AM	BCl3 valve closed
8/7/2012	10:53:15 AM	PH3 valve closed
8/7/2012	10:53:15 AM	SiCl4 pre valve closed
8/7/2012	10:53:15 AM	SiCl4 post valve closed
8/7/2012	10:53:15 AM	Main Vac valve closed
8/7/2012	10:53:15 AM	Bubbler valve closed
8/7/2012	10:53:15 AM	Bypass valve opened
8/7/2012	10:53:15 AM	Helium MFC set to  0.000000
8/7/2012	10:53:15 AM	H2 MFC set to  0.000000
8/7/2012	10:53:15 AM	BCl3 MFC set to  0.000000
8/7/2012	10:53:15 AM	PH3 MFC set to  0.000000
8/7/2012	10:53:15 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:53:15 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:53:15 AM	Tube furnace set to 0
8/7/2012	10:54:40 AM	Helium valve closed
8/7/2012	10:54:40 AM	H2 valve closed
8/7/2012	10:54:40 AM	BCl3 valve closed
8/7/2012	10:54:40 AM	PH3 valve closed
8/7/2012	10:54:40 AM	SiCl4 pre valve closed
8/7/2012	10:54:40 AM	SiCl4 post valve closed
8/7/2012	10:54:40 AM	Main Vac valve closed
8/7/2012	10:54:40 AM	Bubbler valve closed
8/7/2012	10:54:40 AM	Bypass valve opened
8/7/2012	10:54:40 AM	Helium MFC set to  0.000000
8/7/2012	10:54:40 AM	H2 MFC set to  0.000000
8/7/2012	10:54:40 AM	BCl3 MFC set to  0.000000
8/7/2012	10:54:40 AM	PH3 MFC set to  0.000000
8/7/2012	10:54:40 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:54:40 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:54:40 AM	Tube furnace set to 0
8/7/2012	10:55:40 AM	Helium valve closed
8/7/2012	10:55:40 AM	H2 valve closed
8/7/2012	10:55:40 AM	BCl3 valve closed
8/7/2012	10:55:40 AM	PH3 valve closed
8/7/2012	10:55:40 AM	SiCl4 pre valve closed
8/7/2012	10:55:40 AM	SiCl4 post valve closed
8/7/2012	10:55:40 AM	Bypass valve closed
8/7/2012	10:55:40 AM	Bubbler valve closed
8/7/2012	10:55:40 AM	Main Vac valve opened
8/7/2012	10:55:40 AM	Helium MFC set to  0.000000
8/7/2012	10:55:40 AM	H2 MFC set to  0.000000
8/7/2012	10:55:40 AM	BCl3 MFC set to  0.000000
8/7/2012	10:55:40 AM	PH3 MFC set to  0.000000
8/7/2012	10:55:40 AM	SiCl4 MFC set to  0.000000
8/7/2012	10:55:40 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	10:55:40 AM	Tube furnace set to 0
8/7/2012	10:55:41 AM	Run finished at 10:55 AM
8/7/2012	10:55:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	11:01:37 AM	Recipe started at 11:01 AM
8/7/2012	11:01:37 AM	Helium valve closed
8/7/2012	11:01:37 AM	H2 valve closed
8/7/2012	11:01:37 AM	BCl3 valve closed
8/7/2012	11:01:37 AM	PH3 valve closed
8/7/2012	11:01:37 AM	SiCl4 pre valve closed
8/7/2012	11:01:37 AM	SiCl4 post valve closed
8/7/2012	11:01:37 AM	Main Vac valve closed
8/7/2012	11:01:37 AM	Bypass valve closed
8/7/2012	11:01:37 AM	Bubbler valve closed
8/7/2012	11:01:37 AM	Helium MFC set to  0.000000
8/7/2012	11:01:37 AM	H2 MFC set to  0.000000
8/7/2012	11:01:37 AM	BCl3 MFC set to  0.000000
8/7/2012	11:01:37 AM	PH3 MFC set to  0.000000
8/7/2012	11:01:37 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:01:37 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:01:37 AM	Tube furnace set to 0
8/7/2012	11:01:40 AM	Helium valve closed
8/7/2012	11:01:40 AM	BCl3 valve closed
8/7/2012	11:01:40 AM	PH3 valve closed
8/7/2012	11:01:40 AM	SiCl4 pre valve closed
8/7/2012	11:01:40 AM	SiCl4 post valve closed
8/7/2012	11:01:40 AM	Main Vac valve closed
8/7/2012	11:01:40 AM	Bypass valve closed
8/7/2012	11:01:40 AM	Bubbler valve closed
8/7/2012	11:01:40 AM	H2 valve opened
8/7/2012	11:01:40 AM	Helium MFC set to  0.000000
8/7/2012	11:01:40 AM	H2 MFC set to  500.000000
8/7/2012	11:01:40 AM	BCl3 MFC set to  0.000000
8/7/2012	11:01:40 AM	PH3 MFC set to  0.000000
8/7/2012	11:01:40 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:01:40 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:01:40 AM	Tube furnace set to 0
8/7/2012	11:02:54 AM	Helium valve closed
8/7/2012	11:02:54 AM	BCl3 valve closed
8/7/2012	11:02:54 AM	PH3 valve closed
8/7/2012	11:02:54 AM	SiCl4 pre valve closed
8/7/2012	11:02:54 AM	SiCl4 post valve closed
8/7/2012	11:02:54 AM	Main Vac valve closed
8/7/2012	11:02:54 AM	Bypass valve closed
8/7/2012	11:02:54 AM	H2 valve opened
8/7/2012	11:02:54 AM	Bubbler valve opened
8/7/2012	11:02:54 AM	Helium MFC set to  0.000000
8/7/2012	11:02:54 AM	H2 MFC set to  500.000000
8/7/2012	11:02:54 AM	BCl3 MFC set to  0.000000
8/7/2012	11:02:54 AM	PH3 MFC set to  0.000000
8/7/2012	11:02:54 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:02:54 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:02:54 AM	Tube furnace set to 0
8/7/2012	11:02:55 AM	Helium valve closed
8/7/2012	11:02:55 AM	BCl3 valve closed
8/7/2012	11:02:55 AM	PH3 valve closed
8/7/2012	11:02:55 AM	SiCl4 pre valve closed
8/7/2012	11:02:55 AM	SiCl4 post valve closed
8/7/2012	11:02:55 AM	Main Vac valve closed
8/7/2012	11:02:55 AM	Bypass valve closed
8/7/2012	11:02:55 AM	H2 valve opened
8/7/2012	11:02:55 AM	Bubbler valve opened
8/7/2012	11:02:55 AM	Helium MFC set to  0.000000
8/7/2012	11:02:55 AM	H2 MFC set to  500.000000
8/7/2012	11:02:55 AM	BCl3 MFC set to  0.000000
8/7/2012	11:02:55 AM	PH3 MFC set to  0.000000
8/7/2012	11:02:55 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:02:55 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:02:55 AM	Tube furnace set to 850
8/7/2012	11:17:55 AM	Helium valve closed
8/7/2012	11:17:55 AM	BCl3 valve closed
8/7/2012	11:17:55 AM	SiCl4 pre valve closed
8/7/2012	11:17:55 AM	SiCl4 post valve closed
8/7/2012	11:17:55 AM	Main Vac valve closed
8/7/2012	11:17:55 AM	Bypass valve closed
8/7/2012	11:17:55 AM	H2 valve opened
8/7/2012	11:17:55 AM	PH3 valve opened
8/7/2012	11:17:55 AM	Bubbler valve opened
8/7/2012	11:17:55 AM	Helium MFC set to  0.000000
8/7/2012	11:17:55 AM	H2 MFC set to  500.000000
8/7/2012	11:17:55 AM	BCl3 MFC set to  0.000000
8/7/2012	11:17:55 AM	PH3 MFC set to  5.000000
8/7/2012	11:17:55 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:17:55 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:17:55 AM	Tube furnace set to 850
8/7/2012	11:47:55 AM	Helium valve closed
8/7/2012	11:47:55 AM	BCl3 valve closed
8/7/2012	11:47:55 AM	PH3 valve closed
8/7/2012	11:47:55 AM	SiCl4 pre valve closed
8/7/2012	11:47:55 AM	SiCl4 post valve closed
8/7/2012	11:47:55 AM	Main Vac valve closed
8/7/2012	11:47:55 AM	Bypass valve closed
8/7/2012	11:47:55 AM	H2 valve opened
8/7/2012	11:47:55 AM	Bubbler valve opened
8/7/2012	11:47:55 AM	Helium MFC set to  0.000000
8/7/2012	11:47:55 AM	H2 MFC set to  500.000000
8/7/2012	11:47:55 AM	BCl3 MFC set to  0.000000
8/7/2012	11:47:55 AM	PH3 MFC set to  0.000000
8/7/2012	11:47:55 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:47:55 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:47:55 AM	Tube furnace set to 750
8/7/2012	11:52:55 AM	H2 valve closed
8/7/2012	11:52:55 AM	BCl3 valve closed
8/7/2012	11:52:55 AM	PH3 valve closed
8/7/2012	11:52:55 AM	SiCl4 pre valve closed
8/7/2012	11:52:55 AM	SiCl4 post valve closed
8/7/2012	11:52:55 AM	Main Vac valve closed
8/7/2012	11:52:55 AM	Bypass valve closed
8/7/2012	11:52:55 AM	Helium valve opened
8/7/2012	11:52:55 AM	Bubbler valve opened
8/7/2012	11:52:55 AM	Helium MFC set to  500.000000
8/7/2012	11:52:55 AM	H2 MFC set to  0.000000
8/7/2012	11:52:55 AM	BCl3 MFC set to  0.000000
8/7/2012	11:52:55 AM	PH3 MFC set to  0.000000
8/7/2012	11:52:55 AM	SiCl4 MFC set to  0.000000
8/7/2012	11:52:55 AM	Bypass solenoid MFC set to  0.000000
8/7/2012	11:52:56 AM	Tube furnace set to 0
8/7/2012	12:12:56 PM	Helium valve closed
8/7/2012	12:12:56 PM	H2 valve closed
8/7/2012	12:12:56 PM	BCl3 valve closed
8/7/2012	12:12:56 PM	PH3 valve closed
8/7/2012	12:12:56 PM	SiCl4 pre valve closed
8/7/2012	12:12:56 PM	SiCl4 post valve closed
8/7/2012	12:12:56 PM	Main Vac valve closed
8/7/2012	12:12:56 PM	Bypass valve closed
8/7/2012	12:12:56 PM	Bubbler valve closed
8/7/2012	12:12:56 PM	Helium MFC set to  0.000000
8/7/2012	12:12:56 PM	H2 MFC set to  0.000000
8/7/2012	12:12:56 PM	BCl3 MFC set to  0.000000
8/7/2012	12:12:56 PM	PH3 MFC set to  0.000000
8/7/2012	12:12:56 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:12:56 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:12:56 PM	Tube furnace set to 0
8/7/2012	12:12:57 PM	Run finished at 12:12 PM
8/7/2012	12:22:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	12:22:48 PM	Recipe started at 12:22 PM
8/7/2012	12:22:48 PM	Helium valve closed
8/7/2012	12:22:48 PM	H2 valve closed
8/7/2012	12:22:48 PM	BCl3 valve closed
8/7/2012	12:22:48 PM	PH3 valve closed
8/7/2012	12:22:48 PM	SiCl4 pre valve closed
8/7/2012	12:22:48 PM	SiCl4 post valve closed
8/7/2012	12:22:48 PM	Main Vac valve closed
8/7/2012	12:22:48 PM	Bubbler valve closed
8/7/2012	12:22:48 PM	Bypass valve opened
8/7/2012	12:22:48 PM	Helium MFC set to  0.000000
8/7/2012	12:22:48 PM	H2 MFC set to  0.000000
8/7/2012	12:22:48 PM	BCl3 MFC set to  0.000000
8/7/2012	12:22:48 PM	PH3 MFC set to  0.000000
8/7/2012	12:22:48 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:22:48 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:22:48 PM	Tube furnace set to 0
8/7/2012	12:24:08 PM	Helium valve closed
8/7/2012	12:24:08 PM	H2 valve closed
8/7/2012	12:24:08 PM	BCl3 valve closed
8/7/2012	12:24:08 PM	PH3 valve closed
8/7/2012	12:24:08 PM	SiCl4 pre valve closed
8/7/2012	12:24:08 PM	SiCl4 post valve closed
8/7/2012	12:24:08 PM	Main Vac valve closed
8/7/2012	12:24:08 PM	Bubbler valve closed
8/7/2012	12:24:08 PM	Bypass valve opened
8/7/2012	12:24:08 PM	Helium MFC set to  0.000000
8/7/2012	12:24:08 PM	H2 MFC set to  0.000000
8/7/2012	12:24:08 PM	BCl3 MFC set to  0.000000
8/7/2012	12:24:08 PM	PH3 MFC set to  0.000000
8/7/2012	12:24:08 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:24:08 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:24:08 PM	Tube furnace set to 0
8/7/2012	12:25:08 PM	Helium valve closed
8/7/2012	12:25:08 PM	H2 valve closed
8/7/2012	12:25:08 PM	BCl3 valve closed
8/7/2012	12:25:08 PM	PH3 valve closed
8/7/2012	12:25:08 PM	SiCl4 pre valve closed
8/7/2012	12:25:08 PM	SiCl4 post valve closed
8/7/2012	12:25:08 PM	Bypass valve closed
8/7/2012	12:25:08 PM	Bubbler valve closed
8/7/2012	12:25:08 PM	Main Vac valve opened
8/7/2012	12:25:08 PM	Helium MFC set to  0.000000
8/7/2012	12:25:08 PM	H2 MFC set to  0.000000
8/7/2012	12:25:08 PM	BCl3 MFC set to  0.000000
8/7/2012	12:25:08 PM	PH3 MFC set to  0.000000
8/7/2012	12:25:08 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:25:08 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:25:08 PM	Tube furnace set to 0
8/7/2012	12:25:09 PM	Run finished at 12:25 PM
8/7/2012	12:25:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	12:35:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	12:35:58 PM	Recipe started at 12:35 PM
8/7/2012	12:35:58 PM	Helium valve closed
8/7/2012	12:35:58 PM	H2 valve closed
8/7/2012	12:35:58 PM	BCl3 valve closed
8/7/2012	12:35:58 PM	PH3 valve closed
8/7/2012	12:35:58 PM	SiCl4 pre valve closed
8/7/2012	12:35:58 PM	SiCl4 post valve closed
8/7/2012	12:35:58 PM	Main Vac valve closed
8/7/2012	12:35:58 PM	Bubbler valve closed
8/7/2012	12:35:58 PM	Bypass valve opened
8/7/2012	12:35:58 PM	Helium MFC set to  0.000000
8/7/2012	12:35:58 PM	H2 MFC set to  0.000000
8/7/2012	12:35:58 PM	BCl3 MFC set to  0.000000
8/7/2012	12:35:58 PM	PH3 MFC set to  0.000000
8/7/2012	12:35:58 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:35:58 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:35:58 PM	Tube furnace set to 0
8/7/2012	12:35:58 PM	Helium valve closed
8/7/2012	12:35:58 PM	H2 valve closed
8/7/2012	12:35:58 PM	BCl3 valve closed
8/7/2012	12:35:58 PM	PH3 valve closed
8/7/2012	12:35:58 PM	SiCl4 pre valve closed
8/7/2012	12:35:58 PM	SiCl4 post valve closed
8/7/2012	12:35:58 PM	Main Vac valve closed
8/7/2012	12:35:58 PM	Bubbler valve closed
8/7/2012	12:35:58 PM	Bypass valve opened
8/7/2012	12:35:58 PM	Helium MFC set to  0.000000
8/7/2012	12:35:58 PM	H2 MFC set to  0.000000
8/7/2012	12:35:58 PM	BCl3 MFC set to  0.000000
8/7/2012	12:35:58 PM	PH3 MFC set to  0.000000
8/7/2012	12:35:58 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:35:58 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:35:58 PM	Tube furnace set to 0
8/7/2012	12:36:27 PM	Helium valve closed
8/7/2012	12:36:27 PM	H2 valve closed
8/7/2012	12:36:27 PM	BCl3 valve closed
8/7/2012	12:36:27 PM	PH3 valve closed
8/7/2012	12:36:27 PM	SiCl4 pre valve closed
8/7/2012	12:36:27 PM	SiCl4 post valve closed
8/7/2012	12:36:27 PM	Bypass valve closed
8/7/2012	12:36:27 PM	Bubbler valve closed
8/7/2012	12:36:27 PM	Main Vac valve opened
8/7/2012	12:36:27 PM	Helium MFC set to  0.000000
8/7/2012	12:36:27 PM	H2 MFC set to  0.000000
8/7/2012	12:36:27 PM	BCl3 MFC set to  0.000000
8/7/2012	12:36:27 PM	PH3 MFC set to  0.000000
8/7/2012	12:36:27 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:36:27 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:36:27 PM	Tube furnace set to 0
8/7/2012	12:36:57 PM	H2 valve closed
8/7/2012	12:36:57 PM	BCl3 valve closed
8/7/2012	12:36:57 PM	PH3 valve closed
8/7/2012	12:36:57 PM	SiCl4 pre valve closed
8/7/2012	12:36:57 PM	SiCl4 post valve closed
8/7/2012	12:36:57 PM	Bypass valve closed
8/7/2012	12:36:57 PM	Bubbler valve closed
8/7/2012	12:36:57 PM	Helium valve opened
8/7/2012	12:36:57 PM	Main Vac valve opened
8/7/2012	12:36:57 PM	Helium MFC set to  20.000000
8/7/2012	12:36:57 PM	H2 MFC set to  0.000000
8/7/2012	12:36:57 PM	BCl3 MFC set to  0.000000
8/7/2012	12:36:57 PM	PH3 MFC set to  0.000000
8/7/2012	12:36:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:36:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:36:58 PM	Tube furnace set to 0
8/7/2012	12:37:28 PM	Helium valve closed
8/7/2012	12:37:28 PM	H2 valve closed
8/7/2012	12:37:28 PM	BCl3 valve closed
8/7/2012	12:37:28 PM	PH3 valve closed
8/7/2012	12:37:28 PM	SiCl4 pre valve closed
8/7/2012	12:37:28 PM	SiCl4 post valve closed
8/7/2012	12:37:28 PM	Bypass valve closed
8/7/2012	12:37:28 PM	Bubbler valve closed
8/7/2012	12:37:28 PM	Main Vac valve opened
8/7/2012	12:37:28 PM	Helium MFC set to  0.000000
8/7/2012	12:37:28 PM	H2 MFC set to  0.000000
8/7/2012	12:37:28 PM	BCl3 MFC set to  0.000000
8/7/2012	12:37:28 PM	PH3 MFC set to  0.000000
8/7/2012	12:37:28 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:37:28 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:37:28 PM	Tube furnace set to 0
8/7/2012	12:37:33 PM	Run aborted at 12:37 PM
8/7/2012	12:37:33 PM	Helium valve closed
8/7/2012	12:37:33 PM	H2 valve closed
8/7/2012	12:37:33 PM	BCl3 valve closed
8/7/2012	12:37:33 PM	PH3 valve closed
8/7/2012	12:37:33 PM	SiCl4 pre valve closed
8/7/2012	12:37:33 PM	SiCl4 post valve closed
8/7/2012	12:37:33 PM	Bypass valve closed
8/7/2012	12:37:33 PM	Main Vac valve closed
8/7/2012	12:37:33 PM	Bubbler valve closed
8/7/2012	12:37:33 PM	Helium MFC set to  0.000000
8/7/2012	12:37:33 PM	H2 MFC set to  0.000000
8/7/2012	12:37:33 PM	BCl3 MFC set to  0.000000
8/7/2012	12:37:33 PM	PH3 MFC set to  0.000000
8/7/2012	12:37:33 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:37:33 PM	Tube furnace set to 0
8/7/2012	12:37:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	12:37:36 PM	Main Vac valve opened
8/7/2012	12:39:43 PM	Main Vac valve closed
8/7/2012	12:39:53 PM	Main Vac valve opened
8/7/2012	12:40:42 PM	Main Vac valve closed
8/7/2012	12:40:55 PM	Main Vac valve opened
8/7/2012	12:43:48 PM	Helium MFC set to  10.000000
8/7/2012	12:43:53 PM	Helium valve opened
8/7/2012	12:44:07 PM	Helium valve closed
8/7/2012	12:44:10 PM	Helium MFC set to  0.000000
8/7/2012	12:44:30 PM	Main Vac valve closed
8/7/2012	12:44:38 PM	Main Vac valve opened
8/7/2012	12:47:27 PM	Main Vac valve closed
8/7/2012	12:47:37 PM	Main Vac valve opened
8/7/2012	12:48:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	12:48:42 PM	Recipe started at 12:48 PM
8/7/2012	12:48:42 PM	Helium valve closed
8/7/2012	12:48:42 PM	H2 valve closed
8/7/2012	12:48:42 PM	BCl3 valve closed
8/7/2012	12:48:42 PM	PH3 valve closed
8/7/2012	12:48:42 PM	SiCl4 pre valve closed
8/7/2012	12:48:42 PM	SiCl4 post valve closed
8/7/2012	12:48:42 PM	Main Vac valve closed
8/7/2012	12:48:42 PM	Bubbler valve closed
8/7/2012	12:48:42 PM	Bypass valve opened
8/7/2012	12:48:42 PM	Helium MFC set to  0.000000
8/7/2012	12:48:42 PM	H2 MFC set to  0.000000
8/7/2012	12:48:42 PM	BCl3 MFC set to  0.000000
8/7/2012	12:48:42 PM	PH3 MFC set to  0.000000
8/7/2012	12:48:42 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:48:42 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:48:43 PM	Tube furnace set to 0
8/7/2012	12:48:43 PM	Helium valve closed
8/7/2012	12:48:43 PM	H2 valve closed
8/7/2012	12:48:43 PM	BCl3 valve closed
8/7/2012	12:48:43 PM	PH3 valve closed
8/7/2012	12:48:43 PM	SiCl4 pre valve closed
8/7/2012	12:48:43 PM	SiCl4 post valve closed
8/7/2012	12:48:43 PM	Main Vac valve closed
8/7/2012	12:48:43 PM	Bubbler valve closed
8/7/2012	12:48:43 PM	Bypass valve opened
8/7/2012	12:48:43 PM	Helium MFC set to  0.000000
8/7/2012	12:48:43 PM	H2 MFC set to  0.000000
8/7/2012	12:48:43 PM	BCl3 MFC set to  0.000000
8/7/2012	12:48:43 PM	PH3 MFC set to  0.000000
8/7/2012	12:48:43 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:48:43 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:48:43 PM	Tube furnace set to 0
8/7/2012	12:48:44 PM	Helium valve closed
8/7/2012	12:48:44 PM	H2 valve closed
8/7/2012	12:48:44 PM	BCl3 valve closed
8/7/2012	12:48:44 PM	PH3 valve closed
8/7/2012	12:48:44 PM	SiCl4 pre valve closed
8/7/2012	12:48:44 PM	SiCl4 post valve closed
8/7/2012	12:48:44 PM	Bypass valve closed
8/7/2012	12:48:44 PM	Bubbler valve closed
8/7/2012	12:48:44 PM	Main Vac valve opened
8/7/2012	12:48:44 PM	Helium MFC set to  0.000000
8/7/2012	12:48:44 PM	H2 MFC set to  0.000000
8/7/2012	12:48:44 PM	BCl3 MFC set to  0.000000
8/7/2012	12:48:44 PM	PH3 MFC set to  0.000000
8/7/2012	12:48:44 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:48:44 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:48:44 PM	Tube furnace set to 0
8/7/2012	12:49:14 PM	H2 valve closed
8/7/2012	12:49:14 PM	BCl3 valve closed
8/7/2012	12:49:14 PM	PH3 valve closed
8/7/2012	12:49:14 PM	SiCl4 pre valve closed
8/7/2012	12:49:14 PM	SiCl4 post valve closed
8/7/2012	12:49:14 PM	Bypass valve closed
8/7/2012	12:49:14 PM	Bubbler valve closed
8/7/2012	12:49:14 PM	Helium valve opened
8/7/2012	12:49:14 PM	Main Vac valve opened
8/7/2012	12:49:14 PM	Helium MFC set to  20.000000
8/7/2012	12:49:14 PM	H2 MFC set to  0.000000
8/7/2012	12:49:14 PM	BCl3 MFC set to  0.000000
8/7/2012	12:49:14 PM	PH3 MFC set to  0.000000
8/7/2012	12:49:14 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:49:14 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:49:14 PM	Tube furnace set to 0
8/7/2012	12:49:44 PM	Helium valve closed
8/7/2012	12:49:44 PM	H2 valve closed
8/7/2012	12:49:44 PM	BCl3 valve closed
8/7/2012	12:49:44 PM	PH3 valve closed
8/7/2012	12:49:44 PM	SiCl4 pre valve closed
8/7/2012	12:49:44 PM	SiCl4 post valve closed
8/7/2012	12:49:44 PM	Bypass valve closed
8/7/2012	12:49:44 PM	Bubbler valve closed
8/7/2012	12:49:44 PM	Main Vac valve opened
8/7/2012	12:49:44 PM	Helium MFC set to  0.000000
8/7/2012	12:49:44 PM	H2 MFC set to  0.000000
8/7/2012	12:49:44 PM	BCl3 MFC set to  0.000000
8/7/2012	12:49:44 PM	PH3 MFC set to  0.000000
8/7/2012	12:49:44 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:49:44 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:49:44 PM	Tube furnace set to 0
8/7/2012	12:50:14 PM	H2 valve closed
8/7/2012	12:50:14 PM	BCl3 valve closed
8/7/2012	12:50:14 PM	PH3 valve closed
8/7/2012	12:50:14 PM	SiCl4 pre valve closed
8/7/2012	12:50:14 PM	SiCl4 post valve closed
8/7/2012	12:50:14 PM	Bypass valve closed
8/7/2012	12:50:14 PM	Bubbler valve closed
8/7/2012	12:50:14 PM	Helium valve opened
8/7/2012	12:50:14 PM	Main Vac valve opened
8/7/2012	12:50:14 PM	Helium MFC set to  20.000000
8/7/2012	12:50:14 PM	H2 MFC set to  0.000000
8/7/2012	12:50:14 PM	BCl3 MFC set to  0.000000
8/7/2012	12:50:14 PM	PH3 MFC set to  0.000000
8/7/2012	12:50:14 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:50:14 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:50:14 PM	Tube furnace set to 0
8/7/2012	12:50:44 PM	Helium valve closed
8/7/2012	12:50:44 PM	H2 valve closed
8/7/2012	12:50:45 PM	BCl3 valve closed
8/7/2012	12:50:45 PM	PH3 valve closed
8/7/2012	12:50:45 PM	SiCl4 pre valve closed
8/7/2012	12:50:45 PM	SiCl4 post valve closed
8/7/2012	12:50:45 PM	Bypass valve closed
8/7/2012	12:50:45 PM	Bubbler valve closed
8/7/2012	12:50:45 PM	Main Vac valve opened
8/7/2012	12:50:45 PM	Helium MFC set to  0.000000
8/7/2012	12:50:45 PM	H2 MFC set to  0.000000
8/7/2012	12:50:45 PM	BCl3 MFC set to  0.000000
8/7/2012	12:50:45 PM	PH3 MFC set to  0.000000
8/7/2012	12:50:45 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:50:45 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:50:45 PM	Tube furnace set to 0
8/7/2012	12:51:15 PM	H2 valve closed
8/7/2012	12:51:15 PM	BCl3 valve closed
8/7/2012	12:51:15 PM	PH3 valve closed
8/7/2012	12:51:15 PM	SiCl4 pre valve closed
8/7/2012	12:51:15 PM	SiCl4 post valve closed
8/7/2012	12:51:15 PM	Bypass valve closed
8/7/2012	12:51:15 PM	Bubbler valve closed
8/7/2012	12:51:15 PM	Helium valve opened
8/7/2012	12:51:15 PM	Main Vac valve opened
8/7/2012	12:51:15 PM	Helium MFC set to  20.000000
8/7/2012	12:51:15 PM	H2 MFC set to  0.000000
8/7/2012	12:51:15 PM	BCl3 MFC set to  0.000000
8/7/2012	12:51:15 PM	PH3 MFC set to  0.000000
8/7/2012	12:51:15 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:51:15 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:51:15 PM	Tube furnace set to 0
8/7/2012	12:51:45 PM	Helium valve closed
8/7/2012	12:51:45 PM	H2 valve closed
8/7/2012	12:51:45 PM	BCl3 valve closed
8/7/2012	12:51:45 PM	PH3 valve closed
8/7/2012	12:51:45 PM	SiCl4 pre valve closed
8/7/2012	12:51:45 PM	SiCl4 post valve closed
8/7/2012	12:51:45 PM	Bypass valve closed
8/7/2012	12:51:45 PM	Bubbler valve closed
8/7/2012	12:51:45 PM	Main Vac valve opened
8/7/2012	12:51:45 PM	Helium MFC set to  0.000000
8/7/2012	12:51:45 PM	H2 MFC set to  0.000000
8/7/2012	12:51:45 PM	BCl3 MFC set to  0.000000
8/7/2012	12:51:45 PM	PH3 MFC set to  0.000000
8/7/2012	12:51:45 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:51:45 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:51:45 PM	Tube furnace set to 0
8/7/2012	12:52:15 PM	H2 valve closed
8/7/2012	12:52:15 PM	BCl3 valve closed
8/7/2012	12:52:15 PM	PH3 valve closed
8/7/2012	12:52:15 PM	SiCl4 pre valve closed
8/7/2012	12:52:15 PM	SiCl4 post valve closed
8/7/2012	12:52:15 PM	Bypass valve closed
8/7/2012	12:52:15 PM	Bubbler valve closed
8/7/2012	12:52:15 PM	Helium valve opened
8/7/2012	12:52:15 PM	Main Vac valve opened
8/7/2012	12:52:15 PM	Helium MFC set to  20.000000
8/7/2012	12:52:15 PM	H2 MFC set to  0.000000
8/7/2012	12:52:15 PM	BCl3 MFC set to  0.000000
8/7/2012	12:52:15 PM	PH3 MFC set to  0.000000
8/7/2012	12:52:15 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:52:15 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:52:15 PM	Tube furnace set to 0
8/7/2012	12:52:45 PM	Helium valve closed
8/7/2012	12:52:45 PM	H2 valve closed
8/7/2012	12:52:45 PM	BCl3 valve closed
8/7/2012	12:52:45 PM	PH3 valve closed
8/7/2012	12:52:45 PM	SiCl4 pre valve closed
8/7/2012	12:52:45 PM	SiCl4 post valve closed
8/7/2012	12:52:45 PM	Bypass valve closed
8/7/2012	12:52:45 PM	Bubbler valve closed
8/7/2012	12:52:45 PM	Main Vac valve opened
8/7/2012	12:52:45 PM	Helium MFC set to  0.000000
8/7/2012	12:52:46 PM	H2 MFC set to  0.000000
8/7/2012	12:52:46 PM	BCl3 MFC set to  0.000000
8/7/2012	12:52:46 PM	PH3 MFC set to  0.000000
8/7/2012	12:52:46 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:52:46 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:52:46 PM	Tube furnace set to 0
8/7/2012	12:53:16 PM	H2 valve closed
8/7/2012	12:53:16 PM	BCl3 valve closed
8/7/2012	12:53:16 PM	PH3 valve closed
8/7/2012	12:53:16 PM	SiCl4 pre valve closed
8/7/2012	12:53:16 PM	SiCl4 post valve closed
8/7/2012	12:53:16 PM	Bypass valve closed
8/7/2012	12:53:16 PM	Bubbler valve closed
8/7/2012	12:53:16 PM	Helium valve opened
8/7/2012	12:53:16 PM	Main Vac valve opened
8/7/2012	12:53:16 PM	Helium MFC set to  20.000000
8/7/2012	12:53:16 PM	H2 MFC set to  0.000000
8/7/2012	12:53:16 PM	BCl3 MFC set to  0.000000
8/7/2012	12:53:16 PM	PH3 MFC set to  0.000000
8/7/2012	12:53:16 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:53:16 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:53:16 PM	Tube furnace set to 0
8/7/2012	12:53:46 PM	Helium valve closed
8/7/2012	12:53:46 PM	H2 valve closed
8/7/2012	12:53:46 PM	BCl3 valve closed
8/7/2012	12:53:46 PM	PH3 valve closed
8/7/2012	12:53:46 PM	SiCl4 pre valve closed
8/7/2012	12:53:46 PM	SiCl4 post valve closed
8/7/2012	12:53:46 PM	Bypass valve closed
8/7/2012	12:53:46 PM	Bubbler valve closed
8/7/2012	12:53:46 PM	Main Vac valve opened
8/7/2012	12:53:46 PM	Helium MFC set to  0.000000
8/7/2012	12:53:46 PM	H2 MFC set to  0.000000
8/7/2012	12:53:46 PM	BCl3 MFC set to  0.000000
8/7/2012	12:53:46 PM	PH3 MFC set to  0.000000
8/7/2012	12:53:46 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:53:46 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:53:46 PM	Tube furnace set to 0
8/7/2012	12:54:16 PM	H2 valve closed
8/7/2012	12:54:16 PM	BCl3 valve closed
8/7/2012	12:54:16 PM	PH3 valve closed
8/7/2012	12:54:16 PM	SiCl4 pre valve closed
8/7/2012	12:54:16 PM	SiCl4 post valve closed
8/7/2012	12:54:16 PM	Bypass valve closed
8/7/2012	12:54:16 PM	Bubbler valve closed
8/7/2012	12:54:16 PM	Helium valve opened
8/7/2012	12:54:16 PM	Main Vac valve opened
8/7/2012	12:54:16 PM	Helium MFC set to  20.000000
8/7/2012	12:54:16 PM	H2 MFC set to  0.000000
8/7/2012	12:54:16 PM	BCl3 MFC set to  0.000000
8/7/2012	12:54:16 PM	PH3 MFC set to  0.000000
8/7/2012	12:54:16 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:54:16 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:54:16 PM	Tube furnace set to 0
8/7/2012	12:54:46 PM	Helium valve closed
8/7/2012	12:54:46 PM	H2 valve closed
8/7/2012	12:54:46 PM	BCl3 valve closed
8/7/2012	12:54:46 PM	PH3 valve closed
8/7/2012	12:54:46 PM	SiCl4 pre valve closed
8/7/2012	12:54:46 PM	SiCl4 post valve closed
8/7/2012	12:54:46 PM	Bypass valve closed
8/7/2012	12:54:46 PM	Bubbler valve closed
8/7/2012	12:54:46 PM	Main Vac valve opened
8/7/2012	12:54:46 PM	Helium MFC set to  0.000000
8/7/2012	12:54:46 PM	H2 MFC set to  0.000000
8/7/2012	12:54:46 PM	BCl3 MFC set to  0.000000
8/7/2012	12:54:46 PM	PH3 MFC set to  0.000000
8/7/2012	12:54:46 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:54:46 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:54:47 PM	Tube furnace set to 0
8/7/2012	12:55:17 PM	H2 valve closed
8/7/2012	12:55:17 PM	BCl3 valve closed
8/7/2012	12:55:17 PM	PH3 valve closed
8/7/2012	12:55:17 PM	SiCl4 pre valve closed
8/7/2012	12:55:17 PM	SiCl4 post valve closed
8/7/2012	12:55:17 PM	Bypass valve closed
8/7/2012	12:55:17 PM	Bubbler valve closed
8/7/2012	12:55:17 PM	Helium valve opened
8/7/2012	12:55:17 PM	Main Vac valve opened
8/7/2012	12:55:17 PM	Helium MFC set to  20.000000
8/7/2012	12:55:17 PM	H2 MFC set to  0.000000
8/7/2012	12:55:17 PM	BCl3 MFC set to  0.000000
8/7/2012	12:55:17 PM	PH3 MFC set to  0.000000
8/7/2012	12:55:17 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:55:17 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:55:17 PM	Tube furnace set to 0
8/7/2012	12:55:47 PM	Helium valve closed
8/7/2012	12:55:47 PM	H2 valve closed
8/7/2012	12:55:47 PM	BCl3 valve closed
8/7/2012	12:55:47 PM	PH3 valve closed
8/7/2012	12:55:47 PM	SiCl4 pre valve closed
8/7/2012	12:55:47 PM	SiCl4 post valve closed
8/7/2012	12:55:47 PM	Bypass valve closed
8/7/2012	12:55:47 PM	Bubbler valve closed
8/7/2012	12:55:47 PM	Main Vac valve opened
8/7/2012	12:55:47 PM	Helium MFC set to  0.000000
8/7/2012	12:55:47 PM	H2 MFC set to  0.000000
8/7/2012	12:55:47 PM	BCl3 MFC set to  0.000000
8/7/2012	12:55:47 PM	PH3 MFC set to  0.000000
8/7/2012	12:55:47 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:55:47 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:55:47 PM	Tube furnace set to 0
8/7/2012	12:56:17 PM	H2 valve closed
8/7/2012	12:56:17 PM	BCl3 valve closed
8/7/2012	12:56:17 PM	PH3 valve closed
8/7/2012	12:56:17 PM	SiCl4 pre valve closed
8/7/2012	12:56:17 PM	SiCl4 post valve closed
8/7/2012	12:56:17 PM	Bypass valve closed
8/7/2012	12:56:17 PM	Bubbler valve closed
8/7/2012	12:56:17 PM	Helium valve opened
8/7/2012	12:56:17 PM	Main Vac valve opened
8/7/2012	12:56:17 PM	Helium MFC set to  20.000000
8/7/2012	12:56:17 PM	H2 MFC set to  0.000000
8/7/2012	12:56:17 PM	BCl3 MFC set to  0.000000
8/7/2012	12:56:17 PM	PH3 MFC set to  0.000000
8/7/2012	12:56:17 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:56:17 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:56:17 PM	Tube furnace set to 0
8/7/2012	12:56:47 PM	Helium valve closed
8/7/2012	12:56:47 PM	H2 valve closed
8/7/2012	12:56:47 PM	BCl3 valve closed
8/7/2012	12:56:47 PM	PH3 valve closed
8/7/2012	12:56:47 PM	SiCl4 pre valve closed
8/7/2012	12:56:47 PM	SiCl4 post valve closed
8/7/2012	12:56:47 PM	Bypass valve closed
8/7/2012	12:56:47 PM	Bubbler valve closed
8/7/2012	12:56:47 PM	Main Vac valve opened
8/7/2012	12:56:47 PM	Helium MFC set to  0.000000
8/7/2012	12:56:47 PM	H2 MFC set to  0.000000
8/7/2012	12:56:47 PM	BCl3 MFC set to  0.000000
8/7/2012	12:56:47 PM	PH3 MFC set to  0.000000
8/7/2012	12:56:47 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:56:47 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:56:48 PM	Tube furnace set to 0
8/7/2012	12:57:18 PM	H2 valve closed
8/7/2012	12:57:18 PM	BCl3 valve closed
8/7/2012	12:57:18 PM	PH3 valve closed
8/7/2012	12:57:18 PM	SiCl4 pre valve closed
8/7/2012	12:57:18 PM	SiCl4 post valve closed
8/7/2012	12:57:18 PM	Bypass valve closed
8/7/2012	12:57:18 PM	Bubbler valve closed
8/7/2012	12:57:18 PM	Helium valve opened
8/7/2012	12:57:18 PM	Main Vac valve opened
8/7/2012	12:57:18 PM	Helium MFC set to  20.000000
8/7/2012	12:57:18 PM	H2 MFC set to  0.000000
8/7/2012	12:57:18 PM	BCl3 MFC set to  0.000000
8/7/2012	12:57:18 PM	PH3 MFC set to  0.000000
8/7/2012	12:57:18 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:57:18 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:57:18 PM	Tube furnace set to 0
8/7/2012	12:57:48 PM	Helium valve closed
8/7/2012	12:57:48 PM	H2 valve closed
8/7/2012	12:57:48 PM	BCl3 valve closed
8/7/2012	12:57:48 PM	PH3 valve closed
8/7/2012	12:57:48 PM	SiCl4 pre valve closed
8/7/2012	12:57:48 PM	SiCl4 post valve closed
8/7/2012	12:57:48 PM	Bypass valve closed
8/7/2012	12:57:48 PM	Bubbler valve closed
8/7/2012	12:57:48 PM	Main Vac valve opened
8/7/2012	12:57:48 PM	Helium MFC set to  0.000000
8/7/2012	12:57:48 PM	H2 MFC set to  0.000000
8/7/2012	12:57:48 PM	BCl3 MFC set to  0.000000
8/7/2012	12:57:48 PM	PH3 MFC set to  0.000000
8/7/2012	12:57:48 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:57:48 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:57:48 PM	Tube furnace set to 0
8/7/2012	12:58:18 PM	H2 valve closed
8/7/2012	12:58:18 PM	BCl3 valve closed
8/7/2012	12:58:18 PM	PH3 valve closed
8/7/2012	12:58:18 PM	SiCl4 pre valve closed
8/7/2012	12:58:18 PM	SiCl4 post valve closed
8/7/2012	12:58:18 PM	Bypass valve closed
8/7/2012	12:58:18 PM	Bubbler valve closed
8/7/2012	12:58:18 PM	Helium valve opened
8/7/2012	12:58:18 PM	Main Vac valve opened
8/7/2012	12:58:18 PM	Helium MFC set to  20.000000
8/7/2012	12:58:18 PM	H2 MFC set to  0.000000
8/7/2012	12:58:18 PM	BCl3 MFC set to  0.000000
8/7/2012	12:58:18 PM	PH3 MFC set to  0.000000
8/7/2012	12:58:18 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:58:18 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:58:18 PM	Tube furnace set to 0
8/7/2012	12:58:48 PM	Helium valve closed
8/7/2012	12:58:48 PM	H2 valve closed
8/7/2012	12:58:48 PM	BCl3 valve closed
8/7/2012	12:58:48 PM	PH3 valve closed
8/7/2012	12:58:48 PM	SiCl4 pre valve closed
8/7/2012	12:58:48 PM	SiCl4 post valve closed
8/7/2012	12:58:48 PM	Bypass valve closed
8/7/2012	12:58:48 PM	Bubbler valve closed
8/7/2012	12:58:48 PM	Main Vac valve opened
8/7/2012	12:58:48 PM	Helium MFC set to  0.000000
8/7/2012	12:58:48 PM	H2 MFC set to  0.000000
8/7/2012	12:58:48 PM	BCl3 MFC set to  0.000000
8/7/2012	12:58:48 PM	PH3 MFC set to  0.000000
8/7/2012	12:58:48 PM	SiCl4 MFC set to  0.000000
8/7/2012	12:58:48 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	12:58:48 PM	Tube furnace set to 0
8/7/2012	12:58:49 PM	Run finished at 12:58 PM
8/7/2012	12:58:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	1:31:24 PM	Main Vac valve closed
8/7/2012	1:31:37 PM	Main Vac valve opened
8/7/2012	1:32:52 PM	Recipe started at 1:32 PM
8/7/2012	1:32:52 PM	Helium valve closed
8/7/2012	1:32:52 PM	H2 valve closed
8/7/2012	1:32:52 PM	BCl3 valve closed
8/7/2012	1:32:52 PM	PH3 valve closed
8/7/2012	1:32:52 PM	SiCl4 pre valve closed
8/7/2012	1:32:52 PM	SiCl4 post valve closed
8/7/2012	1:32:52 PM	Main Vac valve closed
8/7/2012	1:32:52 PM	Bypass valve closed
8/7/2012	1:32:52 PM	Bubbler valve closed
8/7/2012	1:32:52 PM	Helium MFC set to  0.000000
8/7/2012	1:32:52 PM	H2 MFC set to  0.000000
8/7/2012	1:32:52 PM	BCl3 MFC set to  0.000000
8/7/2012	1:32:52 PM	PH3 MFC set to  0.000000
8/7/2012	1:32:52 PM	SiCl4 MFC set to  0.000000
8/7/2012	1:32:52 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	1:32:52 PM	Tube furnace set to 0
8/7/2012	1:32:55 PM	Helium valve closed
8/7/2012	1:32:55 PM	BCl3 valve closed
8/7/2012	1:32:55 PM	PH3 valve closed
8/7/2012	1:32:55 PM	SiCl4 pre valve closed
8/7/2012	1:32:55 PM	SiCl4 post valve closed
8/7/2012	1:32:55 PM	Main Vac valve closed
8/7/2012	1:32:55 PM	Bypass valve closed
8/7/2012	1:32:55 PM	Bubbler valve closed
8/7/2012	1:32:55 PM	H2 valve opened
8/7/2012	1:32:55 PM	Helium MFC set to  0.000000
8/7/2012	1:32:55 PM	H2 MFC set to  500.000000
8/7/2012	1:32:55 PM	BCl3 MFC set to  0.000000
8/7/2012	1:32:55 PM	PH3 MFC set to  0.000000
8/7/2012	1:32:55 PM	SiCl4 MFC set to  0.000000
8/7/2012	1:32:55 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	1:32:55 PM	Tube furnace set to 0
8/7/2012	1:34:09 PM	Helium valve closed
8/7/2012	1:34:09 PM	BCl3 valve closed
8/7/2012	1:34:09 PM	PH3 valve closed
8/7/2012	1:34:09 PM	SiCl4 pre valve closed
8/7/2012	1:34:09 PM	SiCl4 post valve closed
8/7/2012	1:34:09 PM	Main Vac valve closed
8/7/2012	1:34:09 PM	Bypass valve closed
8/7/2012	1:34:09 PM	H2 valve opened
8/7/2012	1:34:09 PM	Bubbler valve opened
8/7/2012	1:34:09 PM	Helium MFC set to  0.000000
8/7/2012	1:34:09 PM	H2 MFC set to  500.000000
8/7/2012	1:34:09 PM	BCl3 MFC set to  0.000000
8/7/2012	1:34:09 PM	PH3 MFC set to  0.000000
8/7/2012	1:34:09 PM	SiCl4 MFC set to  0.000000
8/7/2012	1:34:09 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	1:34:10 PM	Tube furnace set to 0
8/7/2012	1:34:11 PM	Helium valve closed
8/7/2012	1:34:11 PM	BCl3 valve closed
8/7/2012	1:34:11 PM	PH3 valve closed
8/7/2012	1:34:11 PM	SiCl4 pre valve closed
8/7/2012	1:34:11 PM	SiCl4 post valve closed
8/7/2012	1:34:11 PM	Main Vac valve closed
8/7/2012	1:34:11 PM	Bypass valve closed
8/7/2012	1:34:11 PM	H2 valve opened
8/7/2012	1:34:11 PM	Bubbler valve opened
8/7/2012	1:34:11 PM	Helium MFC set to  0.000000
8/7/2012	1:34:11 PM	H2 MFC set to  500.000000
8/7/2012	1:34:11 PM	BCl3 MFC set to  0.000000
8/7/2012	1:34:11 PM	PH3 MFC set to  0.000000
8/7/2012	1:34:11 PM	SiCl4 MFC set to  0.000000
8/7/2012	1:34:11 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	1:34:11 PM	Tube furnace set to 900
8/7/2012	1:52:11 PM	Helium valve closed
8/7/2012	1:52:11 PM	BCl3 valve closed
8/7/2012	1:52:11 PM	SiCl4 pre valve closed
8/7/2012	1:52:11 PM	SiCl4 post valve closed
8/7/2012	1:52:11 PM	Main Vac valve closed
8/7/2012	1:52:11 PM	Bypass valve closed
8/7/2012	1:52:11 PM	H2 valve opened
8/7/2012	1:52:11 PM	PH3 valve opened
8/7/2012	1:52:11 PM	Bubbler valve opened
8/7/2012	1:52:11 PM	Helium MFC set to  0.000000
8/7/2012	1:52:11 PM	H2 MFC set to  250.000000
8/7/2012	1:52:11 PM	BCl3 MFC set to  0.000000
8/7/2012	1:52:11 PM	PH3 MFC set to  5.000000
8/7/2012	1:52:11 PM	SiCl4 MFC set to  0.000000
8/7/2012	1:52:11 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	1:52:11 PM	Tube furnace set to 900
8/7/2012	2:22:11 PM	Helium valve closed
8/7/2012	2:22:11 PM	BCl3 valve closed
8/7/2012	2:22:11 PM	PH3 valve closed
8/7/2012	2:22:11 PM	SiCl4 pre valve closed
8/7/2012	2:22:11 PM	SiCl4 post valve closed
8/7/2012	2:22:11 PM	Main Vac valve closed
8/7/2012	2:22:11 PM	Bypass valve closed
8/7/2012	2:22:11 PM	H2 valve opened
8/7/2012	2:22:11 PM	Bubbler valve opened
8/7/2012	2:22:11 PM	Helium MFC set to  0.000000
8/7/2012	2:22:11 PM	H2 MFC set to  500.000000
8/7/2012	2:22:11 PM	BCl3 MFC set to  0.000000
8/7/2012	2:22:11 PM	PH3 MFC set to  0.000000
8/7/2012	2:22:11 PM	SiCl4 MFC set to  0.000000
8/7/2012	2:22:11 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	2:22:11 PM	Tube furnace set to 750
8/7/2012	2:27:11 PM	H2 valve closed
8/7/2012	2:27:11 PM	BCl3 valve closed
8/7/2012	2:27:11 PM	PH3 valve closed
8/7/2012	2:27:11 PM	SiCl4 pre valve closed
8/7/2012	2:27:11 PM	SiCl4 post valve closed
8/7/2012	2:27:11 PM	Main Vac valve closed
8/7/2012	2:27:11 PM	Bypass valve closed
8/7/2012	2:27:11 PM	Helium valve opened
8/7/2012	2:27:11 PM	Bubbler valve opened
8/7/2012	2:27:11 PM	Helium MFC set to  500.000000
8/7/2012	2:27:11 PM	H2 MFC set to  0.000000
8/7/2012	2:27:11 PM	BCl3 MFC set to  0.000000
8/7/2012	2:27:11 PM	PH3 MFC set to  0.000000
8/7/2012	2:27:11 PM	SiCl4 MFC set to  0.000000
8/7/2012	2:27:11 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	2:27:11 PM	Tube furnace set to 0
8/7/2012	2:47:12 PM	Helium valve closed
8/7/2012	2:47:12 PM	H2 valve closed
8/7/2012	2:47:12 PM	BCl3 valve closed
8/7/2012	2:47:12 PM	PH3 valve closed
8/7/2012	2:47:12 PM	SiCl4 pre valve closed
8/7/2012	2:47:12 PM	SiCl4 post valve closed
8/7/2012	2:47:12 PM	Main Vac valve closed
8/7/2012	2:47:12 PM	Bypass valve closed
8/7/2012	2:47:12 PM	Bubbler valve closed
8/7/2012	2:47:12 PM	Helium MFC set to  0.000000
8/7/2012	2:47:12 PM	H2 MFC set to  0.000000
8/7/2012	2:47:12 PM	BCl3 MFC set to  0.000000
8/7/2012	2:47:12 PM	PH3 MFC set to  0.000000
8/7/2012	2:47:12 PM	SiCl4 MFC set to  0.000000
8/7/2012	2:47:12 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	2:47:12 PM	Tube furnace set to 0
8/7/2012	2:47:13 PM	Run finished at 2:47 PM
8/7/2012	3:26:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	3:26:46 PM	Recipe started at 3:26 PM
8/7/2012	3:26:46 PM	Helium valve closed
8/7/2012	3:26:46 PM	H2 valve closed
8/7/2012	3:26:46 PM	BCl3 valve closed
8/7/2012	3:26:46 PM	PH3 valve closed
8/7/2012	3:26:46 PM	SiCl4 pre valve closed
8/7/2012	3:26:46 PM	SiCl4 post valve closed
8/7/2012	3:26:46 PM	Main Vac valve closed
8/7/2012	3:26:46 PM	Bypass valve closed
8/7/2012	3:26:46 PM	Bubbler valve closed
8/7/2012	3:26:46 PM	Helium MFC set to  0.000000
8/7/2012	3:26:46 PM	H2 MFC set to  0.000000
8/7/2012	3:26:46 PM	BCl3 MFC set to  0.000000
8/7/2012	3:26:46 PM	PH3 MFC set to  0.000000
8/7/2012	3:26:46 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:26:46 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:26:46 PM	Tube furnace set to 0
8/7/2012	3:26:49 PM	H2 valve closed
8/7/2012	3:26:49 PM	BCl3 valve closed
8/7/2012	3:26:49 PM	PH3 valve closed
8/7/2012	3:26:49 PM	SiCl4 pre valve closed
8/7/2012	3:26:49 PM	SiCl4 post valve closed
8/7/2012	3:26:49 PM	Main Vac valve closed
8/7/2012	3:26:49 PM	Bypass valve closed
8/7/2012	3:26:49 PM	Bubbler valve closed
8/7/2012	3:26:49 PM	Helium valve opened
8/7/2012	3:26:49 PM	Helium MFC set to  500.000000
8/7/2012	3:26:49 PM	H2 MFC set to  0.000000
8/7/2012	3:26:49 PM	BCl3 MFC set to  0.000000
8/7/2012	3:26:49 PM	PH3 MFC set to  0.000000
8/7/2012	3:26:49 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:26:49 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:26:49 PM	Tube furnace set to 0
8/7/2012	3:26:54 PM	Helium valve closed
8/7/2012	3:26:54 PM	H2 valve closed
8/7/2012	3:26:54 PM	BCl3 valve closed
8/7/2012	3:26:54 PM	PH3 valve closed
8/7/2012	3:26:54 PM	SiCl4 pre valve closed
8/7/2012	3:26:54 PM	SiCl4 post valve closed
8/7/2012	3:26:54 PM	Main Vac valve closed
8/7/2012	3:26:54 PM	Bypass valve closed
8/7/2012	3:26:54 PM	Bubbler valve closed
8/7/2012	3:26:54 PM	Helium MFC set to  0.000000
8/7/2012	3:26:54 PM	H2 MFC set to  0.000000
8/7/2012	3:26:54 PM	BCl3 MFC set to  0.000000
8/7/2012	3:26:54 PM	PH3 MFC set to  0.000000
8/7/2012	3:26:54 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:26:54 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:26:55 PM	Tube furnace set to 0
8/7/2012	3:26:56 PM	Run finished at 3:26 PM
8/7/2012	3:26:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2012	3:48:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	3:48:19 PM	Recipe started at 3:48 PM
8/7/2012	3:48:19 PM	Helium valve closed
8/7/2012	3:48:19 PM	H2 valve closed
8/7/2012	3:48:19 PM	BCl3 valve closed
8/7/2012	3:48:19 PM	PH3 valve closed
8/7/2012	3:48:19 PM	SiCl4 pre valve closed
8/7/2012	3:48:19 PM	SiCl4 post valve closed
8/7/2012	3:48:19 PM	Main Vac valve closed
8/7/2012	3:48:19 PM	Bubbler valve closed
8/7/2012	3:48:19 PM	Bypass valve opened
8/7/2012	3:48:19 PM	Helium MFC set to  0.000000
8/7/2012	3:48:19 PM	H2 MFC set to  0.000000
8/7/2012	3:48:19 PM	BCl3 MFC set to  0.000000
8/7/2012	3:48:19 PM	PH3 MFC set to  0.000000
8/7/2012	3:48:19 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:48:19 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:48:19 PM	Tube furnace set to 0
8/7/2012	3:49:53 PM	Helium valve closed
8/7/2012	3:49:53 PM	H2 valve closed
8/7/2012	3:49:53 PM	BCl3 valve closed
8/7/2012	3:49:53 PM	PH3 valve closed
8/7/2012	3:49:53 PM	SiCl4 pre valve closed
8/7/2012	3:49:53 PM	SiCl4 post valve closed
8/7/2012	3:49:53 PM	Main Vac valve closed
8/7/2012	3:49:53 PM	Bubbler valve closed
8/7/2012	3:49:53 PM	Bypass valve opened
8/7/2012	3:49:53 PM	Helium MFC set to  0.000000
8/7/2012	3:49:53 PM	H2 MFC set to  0.000000
8/7/2012	3:49:53 PM	BCl3 MFC set to  0.000000
8/7/2012	3:49:53 PM	PH3 MFC set to  0.000000
8/7/2012	3:49:53 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:49:53 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:49:53 PM	Tube furnace set to 0
8/7/2012	3:50:53 PM	Helium valve closed
8/7/2012	3:50:53 PM	H2 valve closed
8/7/2012	3:50:53 PM	BCl3 valve closed
8/7/2012	3:50:53 PM	PH3 valve closed
8/7/2012	3:50:53 PM	SiCl4 pre valve closed
8/7/2012	3:50:53 PM	SiCl4 post valve closed
8/7/2012	3:50:53 PM	Bypass valve closed
8/7/2012	3:50:53 PM	Bubbler valve closed
8/7/2012	3:50:53 PM	Main Vac valve opened
8/7/2012	3:50:53 PM	Helium MFC set to  0.000000
8/7/2012	3:50:53 PM	H2 MFC set to  0.000000
8/7/2012	3:50:53 PM	BCl3 MFC set to  0.000000
8/7/2012	3:50:53 PM	PH3 MFC set to  0.000000
8/7/2012	3:50:53 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:50:53 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:50:53 PM	Tube furnace set to 0
8/7/2012	3:50:54 PM	Run finished at 3:50 PM
8/7/2012	3:50:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2012	3:54:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	3:54:59 PM	Recipe started at 3:54 PM
8/7/2012	3:54:59 PM	Helium valve closed
8/7/2012	3:54:59 PM	H2 valve closed
8/7/2012	3:54:59 PM	BCl3 valve closed
8/7/2012	3:54:59 PM	PH3 valve closed
8/7/2012	3:54:59 PM	SiCl4 pre valve closed
8/7/2012	3:54:59 PM	SiCl4 post valve closed
8/7/2012	3:54:59 PM	Main Vac valve closed
8/7/2012	3:54:59 PM	Bubbler valve closed
8/7/2012	3:54:59 PM	Bypass valve opened
8/7/2012	3:54:59 PM	Helium MFC set to  0.000000
8/7/2012	3:54:59 PM	H2 MFC set to  0.000000
8/7/2012	3:54:59 PM	BCl3 MFC set to  0.000000
8/7/2012	3:54:59 PM	PH3 MFC set to  0.000000
8/7/2012	3:54:59 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:54:59 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:54:59 PM	Tube furnace set to 0
8/7/2012	3:54:59 PM	Helium valve closed
8/7/2012	3:54:59 PM	H2 valve closed
8/7/2012	3:54:59 PM	BCl3 valve closed
8/7/2012	3:54:59 PM	PH3 valve closed
8/7/2012	3:54:59 PM	SiCl4 pre valve closed
8/7/2012	3:54:59 PM	SiCl4 post valve closed
8/7/2012	3:54:59 PM	Main Vac valve closed
8/7/2012	3:54:59 PM	Bubbler valve closed
8/7/2012	3:54:59 PM	Bypass valve opened
8/7/2012	3:54:59 PM	Helium MFC set to  0.000000
8/7/2012	3:54:59 PM	H2 MFC set to  0.000000
8/7/2012	3:54:59 PM	BCl3 MFC set to  0.000000
8/7/2012	3:54:59 PM	PH3 MFC set to  0.000000
8/7/2012	3:54:59 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:54:59 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:54:59 PM	Tube furnace set to 0
8/7/2012	3:55:00 PM	Helium valve closed
8/7/2012	3:55:00 PM	H2 valve closed
8/7/2012	3:55:00 PM	BCl3 valve closed
8/7/2012	3:55:00 PM	PH3 valve closed
8/7/2012	3:55:00 PM	SiCl4 pre valve closed
8/7/2012	3:55:00 PM	SiCl4 post valve closed
8/7/2012	3:55:00 PM	Bypass valve closed
8/7/2012	3:55:00 PM	Bubbler valve closed
8/7/2012	3:55:00 PM	Main Vac valve opened
8/7/2012	3:55:00 PM	Helium MFC set to  0.000000
8/7/2012	3:55:00 PM	H2 MFC set to  0.000000
8/7/2012	3:55:00 PM	BCl3 MFC set to  0.000000
8/7/2012	3:55:00 PM	PH3 MFC set to  0.000000
8/7/2012	3:55:00 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:55:00 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:55:00 PM	Tube furnace set to 0
8/7/2012	3:55:30 PM	H2 valve closed
8/7/2012	3:55:30 PM	BCl3 valve closed
8/7/2012	3:55:30 PM	PH3 valve closed
8/7/2012	3:55:30 PM	SiCl4 pre valve closed
8/7/2012	3:55:30 PM	SiCl4 post valve closed
8/7/2012	3:55:30 PM	Bypass valve closed
8/7/2012	3:55:30 PM	Bubbler valve closed
8/7/2012	3:55:30 PM	Helium valve opened
8/7/2012	3:55:30 PM	Main Vac valve opened
8/7/2012	3:55:30 PM	Helium MFC set to  20.000000
8/7/2012	3:55:30 PM	H2 MFC set to  0.000000
8/7/2012	3:55:30 PM	BCl3 MFC set to  0.000000
8/7/2012	3:55:30 PM	PH3 MFC set to  0.000000
8/7/2012	3:55:30 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:55:30 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:55:30 PM	Tube furnace set to 0
8/7/2012	3:56:00 PM	Helium valve closed
8/7/2012	3:56:00 PM	H2 valve closed
8/7/2012	3:56:00 PM	BCl3 valve closed
8/7/2012	3:56:00 PM	PH3 valve closed
8/7/2012	3:56:00 PM	SiCl4 pre valve closed
8/7/2012	3:56:00 PM	SiCl4 post valve closed
8/7/2012	3:56:00 PM	Bypass valve closed
8/7/2012	3:56:00 PM	Bubbler valve closed
8/7/2012	3:56:00 PM	Main Vac valve opened
8/7/2012	3:56:00 PM	Helium MFC set to  0.000000
8/7/2012	3:56:00 PM	H2 MFC set to  0.000000
8/7/2012	3:56:00 PM	BCl3 MFC set to  0.000000
8/7/2012	3:56:00 PM	PH3 MFC set to  0.000000
8/7/2012	3:56:00 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:56:00 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:56:00 PM	Tube furnace set to 0
8/7/2012	3:56:30 PM	H2 valve closed
8/7/2012	3:56:30 PM	BCl3 valve closed
8/7/2012	3:56:30 PM	PH3 valve closed
8/7/2012	3:56:30 PM	SiCl4 pre valve closed
8/7/2012	3:56:30 PM	SiCl4 post valve closed
8/7/2012	3:56:30 PM	Bypass valve closed
8/7/2012	3:56:30 PM	Bubbler valve closed
8/7/2012	3:56:30 PM	Helium valve opened
8/7/2012	3:56:30 PM	Main Vac valve opened
8/7/2012	3:56:30 PM	Helium MFC set to  20.000000
8/7/2012	3:56:30 PM	H2 MFC set to  0.000000
8/7/2012	3:56:30 PM	BCl3 MFC set to  0.000000
8/7/2012	3:56:30 PM	PH3 MFC set to  0.000000
8/7/2012	3:56:30 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:56:30 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:56:31 PM	Tube furnace set to 0
8/7/2012	3:57:01 PM	Helium valve closed
8/7/2012	3:57:01 PM	H2 valve closed
8/7/2012	3:57:01 PM	BCl3 valve closed
8/7/2012	3:57:01 PM	PH3 valve closed
8/7/2012	3:57:01 PM	SiCl4 pre valve closed
8/7/2012	3:57:01 PM	SiCl4 post valve closed
8/7/2012	3:57:01 PM	Bypass valve closed
8/7/2012	3:57:01 PM	Bubbler valve closed
8/7/2012	3:57:01 PM	Main Vac valve opened
8/7/2012	3:57:01 PM	Helium MFC set to  0.000000
8/7/2012	3:57:01 PM	H2 MFC set to  0.000000
8/7/2012	3:57:01 PM	BCl3 MFC set to  0.000000
8/7/2012	3:57:01 PM	PH3 MFC set to  0.000000
8/7/2012	3:57:01 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:57:01 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:57:01 PM	Tube furnace set to 0
8/7/2012	3:57:31 PM	H2 valve closed
8/7/2012	3:57:31 PM	BCl3 valve closed
8/7/2012	3:57:31 PM	PH3 valve closed
8/7/2012	3:57:31 PM	SiCl4 pre valve closed
8/7/2012	3:57:31 PM	SiCl4 post valve closed
8/7/2012	3:57:31 PM	Bypass valve closed
8/7/2012	3:57:31 PM	Bubbler valve closed
8/7/2012	3:57:31 PM	Helium valve opened
8/7/2012	3:57:31 PM	Main Vac valve opened
8/7/2012	3:57:31 PM	Helium MFC set to  20.000000
8/7/2012	3:57:31 PM	H2 MFC set to  0.000000
8/7/2012	3:57:31 PM	BCl3 MFC set to  0.000000
8/7/2012	3:57:31 PM	PH3 MFC set to  0.000000
8/7/2012	3:57:31 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:57:31 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:57:31 PM	Tube furnace set to 0
8/7/2012	3:58:01 PM	Helium valve closed
8/7/2012	3:58:01 PM	H2 valve closed
8/7/2012	3:58:01 PM	BCl3 valve closed
8/7/2012	3:58:01 PM	PH3 valve closed
8/7/2012	3:58:01 PM	SiCl4 pre valve closed
8/7/2012	3:58:01 PM	SiCl4 post valve closed
8/7/2012	3:58:01 PM	Bypass valve closed
8/7/2012	3:58:01 PM	Bubbler valve closed
8/7/2012	3:58:01 PM	Main Vac valve opened
8/7/2012	3:58:01 PM	Helium MFC set to  0.000000
8/7/2012	3:58:01 PM	H2 MFC set to  0.000000
8/7/2012	3:58:01 PM	BCl3 MFC set to  0.000000
8/7/2012	3:58:01 PM	PH3 MFC set to  0.000000
8/7/2012	3:58:01 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:58:01 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:58:01 PM	Tube furnace set to 0
8/7/2012	3:58:31 PM	H2 valve closed
8/7/2012	3:58:31 PM	BCl3 valve closed
8/7/2012	3:58:31 PM	PH3 valve closed
8/7/2012	3:58:31 PM	SiCl4 pre valve closed
8/7/2012	3:58:31 PM	SiCl4 post valve closed
8/7/2012	3:58:31 PM	Bypass valve closed
8/7/2012	3:58:31 PM	Bubbler valve closed
8/7/2012	3:58:31 PM	Helium valve opened
8/7/2012	3:58:31 PM	Main Vac valve opened
8/7/2012	3:58:31 PM	Helium MFC set to  20.000000
8/7/2012	3:58:31 PM	H2 MFC set to  0.000000
8/7/2012	3:58:31 PM	BCl3 MFC set to  0.000000
8/7/2012	3:58:31 PM	PH3 MFC set to  0.000000
8/7/2012	3:58:31 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:58:31 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:58:32 PM	Tube furnace set to 0
8/7/2012	3:59:02 PM	Helium valve closed
8/7/2012	3:59:02 PM	H2 valve closed
8/7/2012	3:59:02 PM	BCl3 valve closed
8/7/2012	3:59:02 PM	PH3 valve closed
8/7/2012	3:59:02 PM	SiCl4 pre valve closed
8/7/2012	3:59:02 PM	SiCl4 post valve closed
8/7/2012	3:59:02 PM	Bypass valve closed
8/7/2012	3:59:02 PM	Bubbler valve closed
8/7/2012	3:59:02 PM	Main Vac valve opened
8/7/2012	3:59:02 PM	Helium MFC set to  0.000000
8/7/2012	3:59:02 PM	H2 MFC set to  0.000000
8/7/2012	3:59:02 PM	BCl3 MFC set to  0.000000
8/7/2012	3:59:02 PM	PH3 MFC set to  0.000000
8/7/2012	3:59:02 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:59:02 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:59:02 PM	Tube furnace set to 0
8/7/2012	3:59:32 PM	H2 valve closed
8/7/2012	3:59:32 PM	BCl3 valve closed
8/7/2012	3:59:32 PM	PH3 valve closed
8/7/2012	3:59:32 PM	SiCl4 pre valve closed
8/7/2012	3:59:32 PM	SiCl4 post valve closed
8/7/2012	3:59:32 PM	Bypass valve closed
8/7/2012	3:59:32 PM	Bubbler valve closed
8/7/2012	3:59:32 PM	Helium valve opened
8/7/2012	3:59:32 PM	Main Vac valve opened
8/7/2012	3:59:32 PM	Helium MFC set to  20.000000
8/7/2012	3:59:32 PM	H2 MFC set to  0.000000
8/7/2012	3:59:32 PM	BCl3 MFC set to  0.000000
8/7/2012	3:59:32 PM	PH3 MFC set to  0.000000
8/7/2012	3:59:32 PM	SiCl4 MFC set to  0.000000
8/7/2012	3:59:32 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	3:59:32 PM	Tube furnace set to 0
8/7/2012	4:00:02 PM	Helium valve closed
8/7/2012	4:00:02 PM	H2 valve closed
8/7/2012	4:00:02 PM	BCl3 valve closed
8/7/2012	4:00:02 PM	PH3 valve closed
8/7/2012	4:00:02 PM	SiCl4 pre valve closed
8/7/2012	4:00:02 PM	SiCl4 post valve closed
8/7/2012	4:00:02 PM	Bypass valve closed
8/7/2012	4:00:02 PM	Bubbler valve closed
8/7/2012	4:00:02 PM	Main Vac valve opened
8/7/2012	4:00:02 PM	Helium MFC set to  0.000000
8/7/2012	4:00:02 PM	H2 MFC set to  0.000000
8/7/2012	4:00:02 PM	BCl3 MFC set to  0.000000
8/7/2012	4:00:02 PM	PH3 MFC set to  0.000000
8/7/2012	4:00:02 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:00:02 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:00:02 PM	Tube furnace set to 0
8/7/2012	4:00:32 PM	H2 valve closed
8/7/2012	4:00:32 PM	BCl3 valve closed
8/7/2012	4:00:32 PM	PH3 valve closed
8/7/2012	4:00:32 PM	SiCl4 pre valve closed
8/7/2012	4:00:32 PM	SiCl4 post valve closed
8/7/2012	4:00:32 PM	Bypass valve closed
8/7/2012	4:00:32 PM	Bubbler valve closed
8/7/2012	4:00:32 PM	Helium valve opened
8/7/2012	4:00:32 PM	Main Vac valve opened
8/7/2012	4:00:32 PM	Helium MFC set to  20.000000
8/7/2012	4:00:32 PM	H2 MFC set to  0.000000
8/7/2012	4:00:32 PM	BCl3 MFC set to  0.000000
8/7/2012	4:00:32 PM	PH3 MFC set to  0.000000
8/7/2012	4:00:32 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:00:32 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:00:33 PM	Tube furnace set to 0
8/7/2012	4:01:02 PM	Helium valve closed
8/7/2012	4:01:02 PM	H2 valve closed
8/7/2012	4:01:02 PM	BCl3 valve closed
8/7/2012	4:01:02 PM	PH3 valve closed
8/7/2012	4:01:03 PM	SiCl4 pre valve closed
8/7/2012	4:01:03 PM	SiCl4 post valve closed
8/7/2012	4:01:03 PM	Bypass valve closed
8/7/2012	4:01:03 PM	Bubbler valve closed
8/7/2012	4:01:03 PM	Main Vac valve opened
8/7/2012	4:01:03 PM	Helium MFC set to  0.000000
8/7/2012	4:01:03 PM	H2 MFC set to  0.000000
8/7/2012	4:01:03 PM	BCl3 MFC set to  0.000000
8/7/2012	4:01:03 PM	PH3 MFC set to  0.000000
8/7/2012	4:01:03 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:01:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:01:03 PM	Tube furnace set to 0
8/7/2012	4:01:33 PM	H2 valve closed
8/7/2012	4:01:33 PM	BCl3 valve closed
8/7/2012	4:01:33 PM	PH3 valve closed
8/7/2012	4:01:33 PM	SiCl4 pre valve closed
8/7/2012	4:01:33 PM	SiCl4 post valve closed
8/7/2012	4:01:33 PM	Bypass valve closed
8/7/2012	4:01:33 PM	Bubbler valve closed
8/7/2012	4:01:33 PM	Helium valve opened
8/7/2012	4:01:33 PM	Main Vac valve opened
8/7/2012	4:01:33 PM	Helium MFC set to  20.000000
8/7/2012	4:01:33 PM	H2 MFC set to  0.000000
8/7/2012	4:01:33 PM	BCl3 MFC set to  0.000000
8/7/2012	4:01:33 PM	PH3 MFC set to  0.000000
8/7/2012	4:01:33 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:01:33 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:01:33 PM	Tube furnace set to 0
8/7/2012	4:02:03 PM	Helium valve closed
8/7/2012	4:02:03 PM	H2 valve closed
8/7/2012	4:02:03 PM	BCl3 valve closed
8/7/2012	4:02:03 PM	PH3 valve closed
8/7/2012	4:02:03 PM	SiCl4 pre valve closed
8/7/2012	4:02:03 PM	SiCl4 post valve closed
8/7/2012	4:02:03 PM	Bypass valve closed
8/7/2012	4:02:03 PM	Bubbler valve closed
8/7/2012	4:02:03 PM	Main Vac valve opened
8/7/2012	4:02:03 PM	Helium MFC set to  0.000000
8/7/2012	4:02:03 PM	H2 MFC set to  0.000000
8/7/2012	4:02:03 PM	BCl3 MFC set to  0.000000
8/7/2012	4:02:03 PM	PH3 MFC set to  0.000000
8/7/2012	4:02:03 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:02:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:02:03 PM	Tube furnace set to 0
8/7/2012	4:02:33 PM	H2 valve closed
8/7/2012	4:02:33 PM	BCl3 valve closed
8/7/2012	4:02:33 PM	PH3 valve closed
8/7/2012	4:02:33 PM	SiCl4 pre valve closed
8/7/2012	4:02:33 PM	SiCl4 post valve closed
8/7/2012	4:02:33 PM	Bypass valve closed
8/7/2012	4:02:33 PM	Bubbler valve closed
8/7/2012	4:02:33 PM	Helium valve opened
8/7/2012	4:02:33 PM	Main Vac valve opened
8/7/2012	4:02:33 PM	Helium MFC set to  20.000000
8/7/2012	4:02:33 PM	H2 MFC set to  0.000000
8/7/2012	4:02:33 PM	BCl3 MFC set to  0.000000
8/7/2012	4:02:33 PM	PH3 MFC set to  0.000000
8/7/2012	4:02:33 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:02:33 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:02:33 PM	Tube furnace set to 0
8/7/2012	4:03:03 PM	Helium valve closed
8/7/2012	4:03:03 PM	H2 valve closed
8/7/2012	4:03:03 PM	BCl3 valve closed
8/7/2012	4:03:03 PM	PH3 valve closed
8/7/2012	4:03:03 PM	SiCl4 pre valve closed
8/7/2012	4:03:03 PM	SiCl4 post valve closed
8/7/2012	4:03:03 PM	Bypass valve closed
8/7/2012	4:03:03 PM	Bubbler valve closed
8/7/2012	4:03:03 PM	Main Vac valve opened
8/7/2012	4:03:03 PM	Helium MFC set to  0.000000
8/7/2012	4:03:03 PM	H2 MFC set to  0.000000
8/7/2012	4:03:03 PM	BCl3 MFC set to  0.000000
8/7/2012	4:03:03 PM	PH3 MFC set to  0.000000
8/7/2012	4:03:03 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:03:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:03:04 PM	Tube furnace set to 0
8/7/2012	4:03:34 PM	H2 valve closed
8/7/2012	4:03:34 PM	BCl3 valve closed
8/7/2012	4:03:34 PM	PH3 valve closed
8/7/2012	4:03:34 PM	SiCl4 pre valve closed
8/7/2012	4:03:34 PM	SiCl4 post valve closed
8/7/2012	4:03:34 PM	Bypass valve closed
8/7/2012	4:03:34 PM	Bubbler valve closed
8/7/2012	4:03:34 PM	Helium valve opened
8/7/2012	4:03:34 PM	Main Vac valve opened
8/7/2012	4:03:34 PM	Helium MFC set to  20.000000
8/7/2012	4:03:34 PM	H2 MFC set to  0.000000
8/7/2012	4:03:34 PM	BCl3 MFC set to  0.000000
8/7/2012	4:03:34 PM	PH3 MFC set to  0.000000
8/7/2012	4:03:34 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:03:34 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:03:34 PM	Tube furnace set to 0
8/7/2012	4:04:04 PM	Helium valve closed
8/7/2012	4:04:04 PM	H2 valve closed
8/7/2012	4:04:04 PM	BCl3 valve closed
8/7/2012	4:04:04 PM	PH3 valve closed
8/7/2012	4:04:04 PM	SiCl4 pre valve closed
8/7/2012	4:04:04 PM	SiCl4 post valve closed
8/7/2012	4:04:04 PM	Bypass valve closed
8/7/2012	4:04:04 PM	Bubbler valve closed
8/7/2012	4:04:04 PM	Main Vac valve opened
8/7/2012	4:04:04 PM	Helium MFC set to  0.000000
8/7/2012	4:04:04 PM	H2 MFC set to  0.000000
8/7/2012	4:04:04 PM	BCl3 MFC set to  0.000000
8/7/2012	4:04:04 PM	PH3 MFC set to  0.000000
8/7/2012	4:04:04 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:04:04 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:04:04 PM	Tube furnace set to 0
8/7/2012	4:04:34 PM	H2 valve closed
8/7/2012	4:04:34 PM	BCl3 valve closed
8/7/2012	4:04:34 PM	PH3 valve closed
8/7/2012	4:04:34 PM	SiCl4 pre valve closed
8/7/2012	4:04:34 PM	SiCl4 post valve closed
8/7/2012	4:04:34 PM	Bypass valve closed
8/7/2012	4:04:34 PM	Bubbler valve closed
8/7/2012	4:04:34 PM	Helium valve opened
8/7/2012	4:04:34 PM	Main Vac valve opened
8/7/2012	4:04:34 PM	Helium MFC set to  20.000000
8/7/2012	4:04:34 PM	H2 MFC set to  0.000000
8/7/2012	4:04:34 PM	BCl3 MFC set to  0.000000
8/7/2012	4:04:34 PM	PH3 MFC set to  0.000000
8/7/2012	4:04:34 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:04:34 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:04:34 PM	Tube furnace set to 0
8/7/2012	4:05:04 PM	Helium valve closed
8/7/2012	4:05:04 PM	H2 valve closed
8/7/2012	4:05:04 PM	BCl3 valve closed
8/7/2012	4:05:04 PM	PH3 valve closed
8/7/2012	4:05:04 PM	SiCl4 pre valve closed
8/7/2012	4:05:04 PM	SiCl4 post valve closed
8/7/2012	4:05:04 PM	Bypass valve closed
8/7/2012	4:05:04 PM	Bubbler valve closed
8/7/2012	4:05:04 PM	Main Vac valve opened
8/7/2012	4:05:04 PM	Helium MFC set to  0.000000
8/7/2012	4:05:04 PM	H2 MFC set to  0.000000
8/7/2012	4:05:04 PM	BCl3 MFC set to  0.000000
8/7/2012	4:05:04 PM	PH3 MFC set to  0.000000
8/7/2012	4:05:04 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:05:04 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:05:05 PM	Tube furnace set to 0
8/7/2012	4:05:06 PM	Run finished at 4:05 PM
8/7/2012	4:05:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/7/2012	4:05:31 PM	Main Vac valve closed
8/7/2012	4:05:43 PM	Main Vac valve opened
8/7/2012	4:06:37 PM	Recipe started at 4:06 PM
8/7/2012	4:06:37 PM	Helium valve closed
8/7/2012	4:06:37 PM	H2 valve closed
8/7/2012	4:06:37 PM	BCl3 valve closed
8/7/2012	4:06:37 PM	PH3 valve closed
8/7/2012	4:06:37 PM	SiCl4 pre valve closed
8/7/2012	4:06:37 PM	SiCl4 post valve closed
8/7/2012	4:06:37 PM	Main Vac valve closed
8/7/2012	4:06:37 PM	Bypass valve closed
8/7/2012	4:06:37 PM	Bubbler valve closed
8/7/2012	4:06:37 PM	Helium MFC set to  0.000000
8/7/2012	4:06:37 PM	H2 MFC set to  0.000000
8/7/2012	4:06:37 PM	BCl3 MFC set to  0.000000
8/7/2012	4:06:37 PM	PH3 MFC set to  0.000000
8/7/2012	4:06:37 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:06:37 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:06:38 PM	Tube furnace set to 0
8/7/2012	4:06:41 PM	Helium valve closed
8/7/2012	4:06:41 PM	BCl3 valve closed
8/7/2012	4:06:41 PM	PH3 valve closed
8/7/2012	4:06:41 PM	SiCl4 pre valve closed
8/7/2012	4:06:41 PM	SiCl4 post valve closed
8/7/2012	4:06:41 PM	Main Vac valve closed
8/7/2012	4:06:41 PM	Bypass valve closed
8/7/2012	4:06:41 PM	Bubbler valve closed
8/7/2012	4:06:41 PM	H2 valve opened
8/7/2012	4:06:41 PM	Helium MFC set to  0.000000
8/7/2012	4:06:41 PM	H2 MFC set to  500.000000
8/7/2012	4:06:41 PM	BCl3 MFC set to  0.000000
8/7/2012	4:06:41 PM	PH3 MFC set to  0.000000
8/7/2012	4:06:41 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:06:41 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:06:41 PM	Tube furnace set to 0
8/7/2012	4:07:55 PM	Helium valve closed
8/7/2012	4:07:55 PM	BCl3 valve closed
8/7/2012	4:07:55 PM	PH3 valve closed
8/7/2012	4:07:55 PM	SiCl4 pre valve closed
8/7/2012	4:07:55 PM	SiCl4 post valve closed
8/7/2012	4:07:55 PM	Main Vac valve closed
8/7/2012	4:07:55 PM	Bypass valve closed
8/7/2012	4:07:55 PM	H2 valve opened
8/7/2012	4:07:55 PM	Bubbler valve opened
8/7/2012	4:07:55 PM	Helium MFC set to  0.000000
8/7/2012	4:07:55 PM	H2 MFC set to  500.000000
8/7/2012	4:07:55 PM	BCl3 MFC set to  0.000000
8/7/2012	4:07:55 PM	PH3 MFC set to  0.000000
8/7/2012	4:07:55 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:07:55 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:07:56 PM	Tube furnace set to 0
8/7/2012	4:07:57 PM	Helium valve closed
8/7/2012	4:07:57 PM	BCl3 valve closed
8/7/2012	4:07:57 PM	PH3 valve closed
8/7/2012	4:07:57 PM	SiCl4 pre valve closed
8/7/2012	4:07:57 PM	SiCl4 post valve closed
8/7/2012	4:07:57 PM	Main Vac valve closed
8/7/2012	4:07:57 PM	Bypass valve closed
8/7/2012	4:07:57 PM	H2 valve opened
8/7/2012	4:07:57 PM	Bubbler valve opened
8/7/2012	4:07:57 PM	Helium MFC set to  0.000000
8/7/2012	4:07:57 PM	H2 MFC set to  500.000000
8/7/2012	4:07:57 PM	BCl3 MFC set to  0.000000
8/7/2012	4:07:57 PM	PH3 MFC set to  0.000000
8/7/2012	4:07:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:07:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:07:57 PM	Tube furnace set to 900
8/7/2012	4:25:57 PM	Helium valve closed
8/7/2012	4:25:57 PM	BCl3 valve closed
8/7/2012	4:25:57 PM	PH3 valve closed
8/7/2012	4:25:57 PM	SiCl4 pre valve closed
8/7/2012	4:25:57 PM	SiCl4 post valve closed
8/7/2012	4:25:57 PM	Main Vac valve closed
8/7/2012	4:25:57 PM	Bypass valve closed
8/7/2012	4:25:57 PM	H2 valve opened
8/7/2012	4:25:57 PM	Bubbler valve opened
8/7/2012	4:25:57 PM	Helium MFC set to  0.000000
8/7/2012	4:25:57 PM	H2 MFC set to  250.000000
8/7/2012	4:25:57 PM	BCl3 MFC set to  0.000000
8/7/2012	4:25:57 PM	PH3 MFC set to  0.000000
8/7/2012	4:25:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:25:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:25:57 PM	Tube furnace set to 900
8/7/2012	4:55:57 PM	Helium valve closed
8/7/2012	4:55:57 PM	BCl3 valve closed
8/7/2012	4:55:57 PM	PH3 valve closed
8/7/2012	4:55:57 PM	SiCl4 pre valve closed
8/7/2012	4:55:57 PM	SiCl4 post valve closed
8/7/2012	4:55:57 PM	Main Vac valve closed
8/7/2012	4:55:57 PM	Bypass valve closed
8/7/2012	4:55:57 PM	H2 valve opened
8/7/2012	4:55:57 PM	Bubbler valve opened
8/7/2012	4:55:57 PM	Helium MFC set to  0.000000
8/7/2012	4:55:57 PM	H2 MFC set to  500.000000
8/7/2012	4:55:57 PM	BCl3 MFC set to  0.000000
8/7/2012	4:55:57 PM	PH3 MFC set to  0.000000
8/7/2012	4:55:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	4:55:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	4:55:57 PM	Tube furnace set to 750
8/7/2012	5:00:57 PM	H2 valve closed
8/7/2012	5:00:57 PM	BCl3 valve closed
8/7/2012	5:00:57 PM	PH3 valve closed
8/7/2012	5:00:57 PM	SiCl4 pre valve closed
8/7/2012	5:00:57 PM	SiCl4 post valve closed
8/7/2012	5:00:57 PM	Main Vac valve closed
8/7/2012	5:00:57 PM	Bypass valve closed
8/7/2012	5:00:57 PM	Helium valve opened
8/7/2012	5:00:57 PM	Bubbler valve opened
8/7/2012	5:00:57 PM	Helium MFC set to  500.000000
8/7/2012	5:00:57 PM	H2 MFC set to  0.000000
8/7/2012	5:00:57 PM	BCl3 MFC set to  0.000000
8/7/2012	5:00:57 PM	PH3 MFC set to  0.000000
8/7/2012	5:00:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	5:00:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	5:00:57 PM	Tube furnace set to 0
8/7/2012	5:20:57 PM	Helium valve closed
8/7/2012	5:20:57 PM	H2 valve closed
8/7/2012	5:20:57 PM	BCl3 valve closed
8/7/2012	5:20:57 PM	PH3 valve closed
8/7/2012	5:20:57 PM	SiCl4 pre valve closed
8/7/2012	5:20:57 PM	SiCl4 post valve closed
8/7/2012	5:20:57 PM	Main Vac valve closed
8/7/2012	5:20:57 PM	Bypass valve closed
8/7/2012	5:20:57 PM	Bubbler valve closed
8/7/2012	5:20:57 PM	Helium MFC set to  0.000000
8/7/2012	5:20:57 PM	H2 MFC set to  0.000000
8/7/2012	5:20:57 PM	BCl3 MFC set to  0.000000
8/7/2012	5:20:57 PM	PH3 MFC set to  0.000000
8/7/2012	5:20:57 PM	SiCl4 MFC set to  0.000000
8/7/2012	5:20:57 PM	Bypass solenoid MFC set to  0.000000
8/7/2012	5:20:58 PM	Tube furnace set to 0
8/7/2012	5:20:59 PM	Run finished at 5:20 PM
